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AJA ORION 5 Sputtering System

Manufacturer: AJA International, Inc.
Model: ATC ORION 5 Sputtering System

aja orion 5 Sputtering system

Description: Physical Vapor Deposition system with RF and DC target sputtering capability. 100mm tooling, heated substrate, load lock, film thickness monitor, substrate biasing.

Physical Vapor Deposition

Useful Information

How do I use it?

Standard Operating Procedure

List of available sputtering targets

Updated Spring 2020

How does it work?

Sputtering Tutorial
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