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Bruker DektakXT Stylus Profilometer

Manufacturer: Bruker
Model: DektakXT

System Information

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Photo courtesy of Bruker

Description: The Bruker DektakXT stylus profilometer can be used for measuring step heights and surface features of thin films. The system is capable of taking measurements in the range of approximately 10 nm to 1 mm with a vertical resolution of 1A in the smallest measurement range.  Larger area surface mapping scans can also be completed.

Surface Characterization

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Standard Operating Procedure

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Theory of Operation

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Application Notes