Thin Films Synthesis & Deposition
Thin Films Synthesis & Deposition
The Thin Films Laboratory is home to the nation’s only AIXTRON 2-dimensional close coupled showerhead metal organic vapor phase epitaxy system located at a university. It has 12 MOG sources and 6 process gases. The tool is complemented by a custom-built 1” quartz tube furnace, a PlanarTech 3” Quartz Tube furnace, and 2 MTI furnaces for chemical vapor transport and MXene synthesis.
Access this facility
Interested users and collaborators may contact Prof. David Estrada to learn about accessing equipment and/or requesting samples.