Rapid Thermal Processing Oven (RTP)

Manufacturer:

Modular Process Technology Corp.

Model:

RTP 600-S

Description:

The RTP-600S system is a benchtop rapid thermal processing system. It has multi-gas capabilities and can process wafers up to 6″ in diameter. It can be used for implant activation, contact alloying and silicide formation.  Graphite tooling.