Spin Coater

Manufacturer:

Headway Research Inc.

Model:

PWM 32-PS-R 790

Description:

Designed for hand dispensing of resist on a 4″ or 6″ wafer. Wafer is held to a chuck by vacuum and spun at high speeds to get a uniform coating.  The time and speed of the spinning can be programmed with the on-board controller.

For a list of the current recipes, click here.
Operation Procedure