- CeB6 source
- Up to 30kV accelerating voltage
- Up to 1uA beam current
- Beam current stability within 0.2% per hour (20kV, 10nA)
- Beam diameter of 100nm (20kV, 10nA)
- Analytical resolution of 0.5um (10kV, 100nA)
- Trace element detection limits <0.01wt%
- 5 vertical WDS spectrometers
- Large-area, high-sensitivity diffracting crystals (LPET, LTAP. LLIF, LPC0)
- Analyze elements B-U
- Integrated zoom optical microscope with reflected, transmitted and polarized light
- Stage reproducibility within 1um
- Backscatter electron detector (<0.1Z resolution)
- Secondary electron detector
- Stage and beam mapping
- Line profiles
- Quantitative and qualitative point and area analyses
- Thermo Scientific UltraDry 10mm2 energy dispersive x-ray spectrometer
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