Equipment List

Additive Manufacturing

• FUJIFILM Dimatix Material Printer
• nScrypt 150-3Dn-HP
• Optomec Aerosol Jet AJ 200
• Xenon S-2100 Sintering System
• Voltera One Materials Printer and PCB Prototype System

Characterization and Metrology

• Bruker DektakXT Stylus Profilometer
• J.A. Woollam M-2000 Ellipsometer
• Keyence VHX7000 Digital Microscope

Physical Vapor Deposition

• AJA Orion 5 Sputtering Machine
• CHA Thermal Evaporator
• TORR CrC-150 Sputtering System

Plasma Etch

• Branson 3000 Series RIE/Asher
• Oxford PlasmaLab System 100
• PVA TePla Ion 40
• Veeco Ion Beam Milling Machine

Surface Chemistry/Wet Processing

• JST Acid Bench
• JST Base Bench
• JST Solvent Bench
• SemiTool ST-460 Spin Rinse Dryer

Photolithography

• Quintel Q-4000 Contact Aligner
• OAI 5000 Contact Aligner
• CEE Model 200X-F Spin Coater (Integrated with JST Solvent Processing Station)

Thermal Processing

• MiniBrute MB-80 Thermal Oxidation/Diffusion Furnace
• Rapid Thermal Processing System
• Blue Electric SV-57A Oven
• Programmable Hot Plates (Integrated With Each of Three JST Chemical Processing Stations)
• Systems Integration 7200-1453 Hot Plate

Back-End Processing

• WestBond Model 7476 Wire Bonding System
• K&S Model 4526 Wedge Bonding System
• ADT982-6 Wafer Dicer